Investigation of near-room-temperature self-annealing of electrochemical-deposited (ECD) blanket copper films.
| Autor: | Teh, Weng Hong, Koh, Leong Tee, Chen, Shou Mian, Xie, Joseph, Li, Chao Yong, Foo, Pang Dow |
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| Zdroj: | Proceedings of SPIE; Nov2000, Issue 1, p138-145, 8p |
| Databáze: | Complementary Index |
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