Implanted boron distribution in p+n structures using scanning capacitance microscopy.
| Autor: | Teo, Y. L., Pey, Kin L., Chim, Wai K., Chong, Yung Fu |
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| Zdroj: | Proceedings of SPIE; Nov2000, Issue 1, p175-183, 9p |
| Databáze: | Complementary Index |
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