Dependence of EM performance on linewidth for Cu dual-inlaid structures.
| Autor: | Zhao, Larry, Capasso, Cristiano, Marathe, Amit P., Thrasher, Stacye R., Hernandez, Richard, Mulski, Peggy, Rose, Stewart, Nguyen, Timothy, Gall, Martin, Kawasaki, Hisao |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2000, Issue 1, p13-20, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|