Low-energy damageless Cl2 RIBE of AlGaAs for fabricating laser diodes.
| Autor: | Yu, Jinzhong, Hamagaki, Manabu, Hara, Tamio T., Aoyagi, Yoshinobu, Yuba, Yoshihiko, Namba, Susumu |
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| Zdroj: | Proceedings of SPIE; Nov1992, Issue 1, p586-593, 8p |
| Databáze: | Complementary Index |
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