Production of x-ray mask blanks for a point source stepper.
| Autor: | Trimble, Lee E., Celler, George K., Frackoviak, John, Liddle, James A., Weber, Gary R. |
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| Zdroj: | Proceedings of SPIE; Nov1992, Issue 1, p317-323, 7p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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