Selectively DNQ-esterified PAC for high-performance positive photoresists.
| Autor: | Uenishi, Kazuya, Sakaguchi, Shinji, Kawabe, Yasumasa, Kokubo, Tadayoshi, Toukhy, Medhat A., Jeffries III, Alfred T., Slater, Sydney G., Hurditch, Rodney J. |
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| Zdroj: | Proceedings of SPIE; Nov1992, Issue 1, p262-272, 11p |
| Databáze: | Complementary Index |
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