Studies of dissolution inhibition mechanism of DNQ novolak resists: part III--secondary inhibition with quaternary ammonium salts in development process.
| Autor: | Honda, Kenji, Beauchemin Jr., Bernard T., Hurditch, Rodney J., Blakeney, Andrew J., Kokubo, Tadayoshi |
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| Zdroj: | Proceedings of SPIE; Nov1992, Issue 1, p297-304, 8p |
| Databáze: | Complementary Index |
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