Infrared introscopy and microtomography of semiconductor structures.
| Autor: | Aksenov, Leonid, Aristov, Vitaly V., Frolov, Konstantin, Rau, Edward I. |
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| Zdroj: | Proceedings of SPIE; Nov1992, Issue 1, p288-300, 13p |
| Databáze: | Complementary Index |
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