Spectroscopical investigation of plasma parameters in a RF -discharge CO2+N2+He gas mixtures.
| Autor: | Azharonok, V. V., Filatova, I. I., Shimanovich, V. D., Orlov, L. N., Necrashevich, J. I. |
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| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p296-307, 12p |
| Databáze: | Complementary Index |
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