Optical methods for the measurement of MEMS materials and structures.
| Autor: | He, Xiaoyuan, Kang, Xin, Quan, Chenggen, Tay, Cho J., Wang, Shihua, Shang, Huai M. |
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| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p63-68, 6p |
| Databáze: | Complementary Index |
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