Improvement of alt-PSM production process using backside phase-measurement method.
| Autor: | Saitou, Hidetaka, Koizumi, Yasuhiro, Sanki, Syuichi, Kamibayashi, Tatsuhiko, Murai, Shiaki M., Miyashita, Hiroyuki, Fujita, Hiroshi, Morikawa, Yasutaka, Nara, Masami, Hayashi, Naoya, Hoga, Morihisa |
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| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p1087-1095, 9p |
| Databáze: | Complementary Index |
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