Contribution of polychromatic illumination to optical proximity effects in the context of deep-UV lithography.
| Autor: | Kroyan, Armen, Lalovic, Ivan, Farrar, Nigel R. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p1112-1120, 9p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|