Feasibility study of manufacturing process and quality control for the new alternating PSM structure.
| Autor: | Morikawa, Yasutaka, Kokubo, Haruo, Nishiguchi, Masaharu, Nara, Masami, Totsu, Yousuke, Hoga, Morihisa, Hayashi, Naoya |
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| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p1126-1134, 9p |
| Databáze: | Complementary Index |
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