Power scale-up of the extreme-ultraviolet electric capillary discharge source.
| Autor: | Fornaciari, Neal R., Bender, Howard, Buchenauer, Dean, Dimkoff, Jason L., Kanouff, Michael P., Karim, Steve, Romeo, Carmelo, Shimkaveg, Gregory M., Silfvast, William T., Stewart, Kenneth D. |
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| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p110-121, 12p |
| Databáze: | Complementary Index |
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