Fine pattern replication on 10 x 10-mm exposure area using ETS-1 laboratory tool in HIT.
| Autor: | Hamamoto, K., Watanabe, Takeo, Hada, Hideo, Komano, Hiroshi, Kishimura, Shinji, Okazaki, Shinji, Kinoshita, Hiroo |
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| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p664-671, 8p |
| Databáze: | Complementary Index |
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