Thermomechanical modeling of the pin-chucked EUV reticle during exposure.
| Autor: | Wei, Alexander C., Martin, Carl J., Beckman, William A., Mitchell, John W., Engelstad, Roxann L., Lovell, Edward G., Blaedel, Kenneth L. |
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| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p743-753, 11p |
| Databáze: | Complementary Index |
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