Planarization for the integration of CMOS and micromirror arrays.
| Autor: | Zheng, Yun, Dutta, Mitra B., Kotecki, Carl A., Zincke, Christian A. |
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| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p1070-1076, 7p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Zheng, Yun, Dutta, Mitra B., Kotecki, Carl A., Zincke, Christian A. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p1070-1076, 7p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|