2D-image-based CD-SEM applications for thin film head metrology.
| Autor: | Venkataram, Srinath, Khanna, Neeraj, Lewis, Sanford, Khera, Gautam |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p892-903, 12p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Venkataram, Srinath, Khanna, Neeraj, Lewis, Sanford, Khera, Gautam |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p892-903, 12p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|