2D-image-based CD-SEM applications for thin film head metrology.
Autor: | Venkataram, Srinath, Khanna, Neeraj, Lewis, Sanford, Khera, Gautam |
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Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p892-903, 12p |
Databáze: | Complementary Index |
Externí odkaz: |