Spin coating and photolithography using liquid and supercritical carbon dioxide.
| Autor: | Hoggan, Erik N., Flowers, Devin, DeSimone, Joseph M., Carbonell, Ruben G. |
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| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p1217-1223, 7p |
| Databáze: | Complementary Index |
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