ArF imaging with off-axis illumination and subresolution assist bars: a compromise between mask constraints and lithographic process constraints.
| Autor: | Trouiller, Yorick, Serrand, J., Miramond, Corinne, Rody, Yves F., Manakli, Serdar, Goirand, Pierre-Jerome |
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| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p1522-1529, 8p |
| Databáze: | Complementary Index |
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