Solutions for printing sub-100-nm contacts with ArF.
| Autor: | Graeupner, Paul, Goehnermeier, Aksel, Lowisch, Martin, Garreis, Reiner B., Flagello, Donis G., Hansen, Steven G., Socha, Robert J., Koehler, Carsten |
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| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p503-514, 12p |
| Databáze: | Complementary Index |
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