Impact of scanner tilt and defocus on CD uniformity across field.
| Autor: | Detweiler, Shangting F., Chang, Simon, Zheng, Sandra, Gagnon, Patrick, Baum, Christopher C., Boehm, Mark A., Brown, Jay M., Fruga, Catherine H. |
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| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p882-890, 9p |
| Databáze: | Complementary Index |
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