Bottom antireflective coating processing techniques for via-first dual-damascene processes.
| Autor: | Brakensiek, Nickolas L. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p927-936, 10p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Brakensiek, Nickolas L. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p927-936, 10p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|