IC yield prediction and analysis using semi-empirical yield models and test data.
Autor: | Ciplickas, Dennis J., Niewczas, Mariusz, Ruehl, Roland, Stine, Brian, Vallishayee, Rakesh R., Wojciak, Wojtek |
---|---|
Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p345-351, 7p |
Databáze: | Complementary Index |
Externí odkaz: |