Validation of the aberration-pattern-matching OPC strategy.
| Autor: | Gennari, Frank E., Robins, Garth, Neureuther, Andrew R. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p444-453, 10p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Gennari, Frank E., Robins, Garth, Neureuther, Andrew R. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p444-453, 10p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|