NEGATIVE-CAR blanks feasibility study results for EB reticle fabrication beyond 100-nm node.
| Autor: | Ota, Fumiko, Hashimoto, Masahiro, Asakawa, Keishi, Higuchi, Takao, Yokoya, Yasunori |
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| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p217-228, 12p |
| Databáze: | Complementary Index |
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