Processing techniques in the manufacture of 100-nm node and below inspection test reticles.
| Autor: | Cheng, Nicole, Su, Clyde, Chen, Frank, Cheng, Bill, Taylor, Darren |
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| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p554-557, 4p |
| Databáze: | Complementary Index |
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