Polysilicon surface-micromachined spatial light modulator with novel electronic integration.
| Autor: | Dimas, Clara E., Bifano, Thomas G., Bierden, Paul A., Perreault, Julie A., Krulevitch, Peter A., Roehnelt, Ryan T., Cornelissen, Steven |
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| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p477-484, 8p |
| Databáze: | Complementary Index |
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