2f method for the measurement of resonant frequency and Q-factor of micromechanical transducers.
| Autor: | Logeeswaran, V. J., Tay, Francis E., Chan, M. L., Chau, Fook S., Liang, Yung C. |
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| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p584-593, 10p |
| Databáze: | Complementary Index |
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