New techniques for laser micromachining MEMS devices.
| Autor: | Abbott, Charles, Allott, Ric M., Bann, Bob, Boehlen, Karl L., Gower, Malcolm C., Rumsby, Phil T., Stassen Boehlen, Ines, Sykes, Neil |
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| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p281-288, 8p |
| Databáze: | Complementary Index |
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