Progress in the fabrication of high-aspect-ratio zone plates by soft x-ray lithography.
| Autor: | Divan, Ralu, Mancini, Derrick C., Moldovan, Nicolai A., Lai, Barry P., Assoufid, Lahsen, Leonard, Quinn J., Cerrina, Franco |
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| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p82-91, 10p |
| Databáze: | Complementary Index |
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