Development of optical MEMS CO2 sensors.
Autor: | McNeal, Mark P., Moelders, Nicholas, Pralle, Martin U., Puscasu, Irina, Last, Lisa, Ho, William, Greenwald, Anton C., Daly, James T., Johnson, Edward A., George, Thomas |
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Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p30-35, 6p |
Databáze: | Complementary Index |
Externí odkaz: |
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