Design and fabrication of an analog ASIC interfacing a -resonant capacitive MEMS sensor in a high-temperature environment (200C).
| Autor: | Robert, Olivier, Gigan, Olivier, Chen, Hua, Amendola, Gilles |
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| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p342-353, 12p |
| Databáze: | Complementary Index |
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