Production scale MOVPE reactors for electronic and optoelectronic applications.
| Autor: | Protzmann, Harry, Gerstenbrandt, Georg, Alam, Assadullah, Schoen, Oliver, Luenenbuerger, Markus, Dikme, Yilmaz, Kalisch, Holger, Jansen, Rolf H., Heuken, Michael |
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| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p72-74, 3p |
| Databáze: | Complementary Index |
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