Noncontact ultrasonic ULSI process metrology using ultrafast lasers.
| Autor: | Stoner, Robert J., Morath, Christopher J., Tas, Guray, Sengupta, Samit S., Merchant, Sailesh M., Bindell, Jeffery B., Maris, Humphrey J. |
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| Zdroj: | Proceedings of SPIE; Nov1998, Issue 1, p104-112, 9p |
| Databáze: | Complementary Index |
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