Design and fabrication of optical MEMS using a four-level planarized surface-micromachined polycrystalline silicon process.
| Autor: | Michalicek, M. Adrian, Comtois, John H., Schriner, Heather K. |
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| Zdroj: | Proceedings of SPIE; Nov1998, Issue 1, p48-55, 8p |
| Databáze: | Complementary Index |
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