Combined photonics and MEMS function demonstration.
| Autor: | Blum-Spahn, Olga, Warren, Mial E., Hou, Hong Q., Carson, Richard F., Choquette, Kent D., Rodgers, M. Steven, Sniegowski, Jeffry J. |
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| Zdroj: | Proceedings of SPIE; Nov1998, Issue 1, p57-61, 5p |
| Databáze: | Complementary Index |
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