Thermochemical technology of the layer-by-layer synthesis of multilevel chromium masks as precision molds for the phase shaping of high-efficiency large-aperture lenses.
| Autor: | Kiryanov, Valery P., Verkhogliad, Alexander G., Kastorsky, Leonid B., Kiryanov, Alexey V., Kozlov, Vladimir I. |
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| Zdroj: | Proceedings of SPIE; Nov1998 Part 2, Issue 1, p228-233, 6p |
| Databáze: | Complementary Index |
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