Micromachined wet cell for a Love-wave liquid sensor.

Autor: Curtin, Scott D., Jakoby, Bernhard, Berthold, Axel, Varadan, Vijay K., Varadan, Vasundara V., Vellekoop, Michael J.
Zdroj: Proceedings of SPIE; Nov1998 Part 2, Issue 1, p194-200, 7p
Databáze: Complementary Index