Optical-fiber-interconnected MEMS sensors and actuators.
| Autor: | Miller, Michael B., Meller, Scott A., Wavering, Thomas A., Greene, Jonathan A., Murphy, Kent A. |
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| Zdroj: | Proceedings of SPIE; Nov1998, Issue 1, p174-179, 6p |
| Databáze: | Complementary Index |
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