Ellipsometric scatterometry for sub-0.1-m CD measurements.
| Autor: | Coulombe, Stephen A., Logofatu, Petre-Catalin, Minhas, Babar K., Naqvi, S. Sohail H., McNeil, John R. |
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| Zdroj: | Proceedings of SPIE; Nov1998 Part 2, Issue 1, p282-293, 12p |
| Databáze: | Complementary Index |
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