New design principle for the PACs of novolak resists.
Autor: | Jha, Salil, Reiser, Arnost |
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Zdroj: | Proceedings of SPIE; Nov1998 Part 2, Issue 1, p376-383, 8p |
Databáze: | Complementary Index |
Externí odkaz: |
Autor: | Jha, Salil, Reiser, Arnost |
---|---|
Zdroj: | Proceedings of SPIE; Nov1998 Part 2, Issue 1, p376-383, 8p |
Databáze: | Complementary Index |
Externí odkaz: |