New design principle for the PACs of novolak resists.
| Autor: | Jha, Salil, Reiser, Arnost |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1998 Part 2, Issue 1, p376-383, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Jha, Salil, Reiser, Arnost |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1998 Part 2, Issue 1, p376-383, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|