Dissolution-rate analysis of ArF resist polymers based on the percolation model.
| Autor: | Yamaguchi, Atsuko, Kishimura, Shinji, Matsuzawa, Nobuyuki N., Ohfuji, Takeshi, Tanaka, Tomoaki, Tagawa, Seiichi, Sasago, Masaru |
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| Zdroj: | Proceedings of SPIE; Nov1998 Part 2, Issue 1, p601-610, 10p |
| Databáze: | Complementary Index |
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