Imaging performance of scanning exposure systems.
| Autor: | Ebinuma, Ryuichi, Iwamoto, Kazunori, Takeishi, Hiroaki, Itoh, Hiroshi, Inoue, Mitsuru, Takahashi, Kazuhiro, Ohta, Masakatsu |
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| Zdroj: | Proceedings of SPIE; Nov1998 Part 2, Issue 1, p437-447, 11p |
| Databáze: | Complementary Index |
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