Characterization of a next-generation step-and-scan system.
| Autor: | Wiltshire, Timothy J., Kirk, Joseph P., Wheeler, Donald C., Obszarny, Christopher, Marsh, James T., Odiwo, Donald M. |
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| Zdroj: | Proceedings of SPIE; Nov1998 Part 2, Issue 1, p448-459, 12p |
| Databáze: | Complementary Index |
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