Optical characterization of carbon ion implantation into Si and SiGe alloys.
| Autor: | Perez-Rodriguez, Alejandro, Romano-Rodriguez, A., Serre, Christoph, Calvo-Barrio, L., Gonzalez-Varona, O., Morante, Juan R. |
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| Zdroj: | Proceedings of SPIE; Nov1998 Part 2, Issue 1, p324-333, 10p |
| Databáze: | Complementary Index |
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