Inspecting the microprofile and defects of optical surfaces using an atomic-force microscope.
| Autor: | Li, Jianbai, Xiao, Shaorong, Zhuo, Anging, Li, Dacheng |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1998 Part 2, Issue 1, p270-273, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|