Improved analytic models and efficient parameter extraction for computationally efficient 1D and 2D ion implantation modeling.
| Autor: | Balamurugan, Ganesh, Obradovic, Borna J., Wang, Geng, Chen, Yidong, Tasch, Al F. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1998 Part 2, Issue 1, p313-321, 9p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|