Development and testing of an active platen for IC manufacturing.
| Autor: | Redmond, James M., Barney, Pat, Smith, Tony G., Darnold, Joel R. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1998, Issue 1, p54-60, 7p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Redmond, James M., Barney, Pat, Smith, Tony G., Darnold, Joel R. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1998, Issue 1, p54-60, 7p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|