TOF-SIMS: a tool for material characterization, process control, and improvement in a wafer fab.
| Autor: | Fiorani, Paolo, Margutti, G., Mariani, Giuseppe, Matarazzo, S., Moccia, Giuseppe |
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| Zdroj: | Proceedings of SPIE; Nov1998 Part 2, Issue 1, p221-227, 7p |
| Databáze: | Complementary Index |
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